Climate and temperature tests

Our semiconductor reliability solutions ensure performance under extreme conditions, covering Climate and Temperature Tests, Temperature Humidity Bias (THB), High Humidity High Temperature Reverse Bias (H3TRB), Negative Bias Temperature Instability (NBTI), and High Temperature Operating Life (HTOL)

Thermal shock tests

Our thermal shock test chambers combine flexibility and efficiency with volumes of 60, 120, or 300 liters, temperature ranges from -80 °C to +220 °C, and up to 1,000 cycles without deicing. Performance options reduce adjustment times to under 12 minutes, while energy-saving mode cuts consumption by up to 30%.

Burn-in tests

Our burn-in test chambers ensure precise reliability testing with temperature ranges from -30 °C to +150 °C (extended on request), heat compensation of approx. 6 kW at 85 °C, and fast heating and cooling rates of 10 K/min and 4.5 K/min. They deliver perfect homogeneity of ±0.5 to ±1.5 K, use eco-friendly CO₂ refrigerant, and allow front loading with customizable slit back plates for contacting.

-75°C wafer cooling for stress relief and warpage reduction

Our Cryochamber is designed for clean room integration (ISO 4 outside, ISO 3 inside) and achieves temperatures down to -75 °C. It connects seamlessly to Manufacturing Execution Systems via SECS/GEM and integrates with Overhead Hoist Transfer Systems for automated door operation. Batch recognition is enabled through QR codes for efficient handling.

Inert gas oven

Space-saving and cleanroom-ready, our oven system is stackable up to three units and routes maintenance and heat discharge to the gray room. It ensures ISO 5 compliance, residual oxygen below 10 ppm, and temperatures up to 400 °C. Applications include retention bake, burn-in, wafer testing, LTHC curing for TSV, BEOL wafer treatment, and MEMS packaging.

Convection oven for flammable substances | solvent annealing

Ideal for soft and hard bake of photoresists and glass frit bonding at up to 450 °C for MEMS sensors. The system is completely silicone-free, equipped with a SECS/GEM interface, and designed for safe processing of flammable materials with precise convection heating.

Drying oven

Compact and cleanroom-ready up to ISO 4, these ovens offer the best footprint in the cleanroom and feature a pull-out switch cabinet and a completely silicone-free design. Ideal for drying wafer transport boxes and for post-cleaning of epitaxy equipment.

Continous oven

Designed for cleanroom environments up to ISO 5, this silicone-free oven system features a SECS/GEM interface for seamless integration. Ideal for lead-frame processing with continuous operation for maximum efficiency.

Turnkey cleanroom solutions

From planning to installation, we deliver complete cleanroom systems tailored to your needs. Our solutions include Filter Fan Units (FFUs), workbenches and laminar flow units, mini environments and enclosures, air-conditioning units Vindur Compact, adsorption dehumidifiers, cleanroom cabins, and full cleanrooms. We provide wall, ceiling, and floor systems with integrated lighting and media supply, personnel and material airlocks, monitoring systems, and comprehensive after-sales services.

Measuring rooms

Our turnkey measuring rooms create extremely constant and precisely defined conditions for chip production. All parameters such as temperature and air humidity can be controlled and regulated to the process-oriented. 

Mini & Micro environments with condition air treatments

Compact cleanroom solutions for localized contamination control. Our mini and micro environments provide ISO-compliant conditions for sensitive processes, featuring modular enclosures, laminar airflow, integrated monitoring, and flexible design for easy integration into existing production lines.

Process air treatments within semiconductor machines

Our integrated solutions provide clean, conditioned process air and precise cooling for semiconductor equipment. They maintain ISO-compliant environments with advanced filtration, adsorption dehumidification, temperature and humidity control, and efficient cooling systems. Designed for seamless integration, these units ensure maximum process stability and contamination control.